my country is highly dependent on imports of electronic grade dichlorosilane, and there is broad room for domestic substitution in the future.

Under normal temperatures and pressures, dichlorosilane is a colorless, toxic gas with a pungent suffocating odor and corrosiveness. It is flammable and generates hydrogen chloride and silicon oxide after combustion and oxidation. Dichlorosilane is soluble in benzene, ether and carbon tetrachloride, and hydrolyzes when in contact with water to form hydrochloric acid, which is transported as a liquefied gas under its own vapor pressure. In semiconductor manufacturing and integrated circuits, dichlorosilane is mainly used for epitaxial growth of polysilicon and chemical vapor deposition of silicon dioxide and silicon nitride. In recent years, with the rapid development of my country’s semiconductor industry, the market demand for electronic-grade dichlorosilane has been released. However, due to technical limitations, my country’s electronic-grade dichlorosilane is highly dependent on imports.

The silicon content of electronic grade dichlorosilane is higher than that of trichlorosilane and silicon tetrachloride. It is more effective to deposit silicon, and the temperature required for deposition is lower than other chlorosilanes. Therefore, thicker layers are deposited at lower temperatures. Layers take less time. Electronic grade dichlorosilane is an indispensable and important material in the manufacturing process of microelectronics and optoelectronic components. It complies with the “Catalogue of Encouraged Imported Technologies and Products” issued by the Ministry of Commerce in 2016 and is one of the key industries encouraged by the country. Electronic grade dichlorosilane is highly dependent on imports. In order to ensure the healthy development of my country’s information industry, it is imperative to independently develop electronic grade dichlorosilane.

According to the “2021 Global Electronic Grade High Purity Dichlorosilane Industry Market Status Research Report released by the Industrial Research Center, Due to production technology factors, at this stage, there are only a small number of global suppliers of electronic grade dichlorosilane, mainly distributed in Japan, the United States, Germany and other countries, including Japan’s Shin-Etsu, Taiyo Nippon Sanso, Air Liquide, Germany’s Merck, etc. enterprise. From a domestic perspective, there are only a handful of electronic-grade dichlorosilane manufacturers in my country. Related companies include Tangshan Sanfu Co., Ltd., Henan Qinyang Lingkong Special Gas, etc.

On January 19, 2021, an announcement issued by Sanfu Co., Ltd. showed that Tangshan Sanfu Electronic Materials Co., Ltd., a wholly-owned subsidiary, invested in the construction of an annual production capacity of 500 tons of electronic grade dichlorosilane and an annual production of 1,000 tons of electronic grade trichlorosilane. The project was officially put into trial operation on November 13, 2020. The total investment in the project is 287.24 million yuan. At present, all the process flows have been successfully opened normally, and the products have been successfully trial-filled. With the gradual development and implementation of electronic-grade dichlorosilane projects under construction, the localization process of electronic-grade dichlorosilane will gradually accelerate. In the future, my country’s dependence on external sources of electronic-grade dichlorosilane will decrease.

Industry analysts said that electronic grade dichlorosilane is an indispensable and important material in the manufacturing process of microelectronics and optoelectronic components. , is a key industry encouraged by the state. At this stage, there are only a small number of electronic-grade dichlorosilane manufacturers in my country, and the products are highly dependent on imported products. There is broad room for domestic substitution of electronic-grade dichlorosilane. However, as the country pays more attention to it and the production capacity of enterprises increases, my country’s electronic grade dichlorosilane market will continue to decline in external dependence in the next few years.